| Security | Num Shares | Value | Price $ | Transaction Date | Ownership | Underlying Class | Underlying Amount |
|---|---|---|---|---|---|---|---|
| Amtech Systems, Inc. $0.01 par value common stock | 31,499 | $122,846 | $3.90 | 28 Nov 2022 | Direct | ||
| Amtech Systems, Inc. Employee Stock Option | 12,000 | $68,040 | $5.67 | 01 Dec 2022 | Direct | Amtech Systems, Inc. $0.01 par value common stock |
| Sym | Class | Transaction | % | Value $ | * Price $ | Shares | Shares After | Date | Ownership |
|---|