| Security | Num Shares | Value | Price $ | Transaction Date | Ownership | Underlying Class | Underlying Amount |
|---|---|---|---|---|---|---|---|
| Amtech Systems, Inc. Employee Stock Option | 30,000 | $180,000 | $6.00 | 15 Mar 2024 | Direct | Amtech Systems, Inc. $0.01 par value common stock |
| Sym | Class | Transaction | % | Value $ | * Price $ | Shares | Shares After | Date | Ownership |
|---|